پیوندهای مفید
آمار
| تعداد نشریات | 21 |
| تعداد شمارهها | 678 |
| تعداد مقالات | 9,888 |
| تعداد مشاهده مقاله | 70,057,518 |
| تعداد دریافت فایل اصل مقاله | 49,329,796 |
Influence of Temperature Dependence of Electrical Conductivity of Graphite Crucible in Czochralski Crystal Growth: A Numerical Analysis | ||
| Progress in Physics of Applied Materials | ||
| دوره 3، شماره 2 - شماره پیاپی 5، اسفند 2023، صفحه 131-139 اصل مقاله (1.04 M) | ||
| نوع مقاله: Original Article | ||
| شناسه دیجیتال (DOI): 10.22075/ppam.2023.32556.1073 | ||
| نویسندگان | ||
| Sanaz Hadidchi؛ Mohammad Hossein Tavakoli* | ||
| Physics Department, Bu-Ali Sina University, Hamedan 65174, I.R. Iran | ||
| تاریخ دریافت: 14 آذر 1402، تاریخ بازنگری: 26 آذر 1402، تاریخ پذیرش: 02 دی 1402 | ||
| چکیده | ||
| Graphite crucibles are widely used in induced crystal growth systems. This study examines the impact of temperature variation on the electrical conductivity of the graphite crucible and its influence on the temperature field and melt flow in a Czochralski germanium crystal growth furnace using the two-dimensional finite element method. The in-depth analysis demonstrates that the temperature-dependence of electrical conductivity of the crucible is crucial in the growth process and the thermal field of the setup. Specifically, it is noted that temperature changes have a significant effect on the generation and distribution of induction heat, the temperature and melt flow field, the complex shape of the crystal-melt interface, as well as the stress and dislocations in the grown crystal. These findings highlight the intricate relationship between temperature, crucible conductivity, and the dynamics of the crystal growth process, providing insight into the subtle factors that impact the quality and properties of the resulting crystal. | ||
| کلیدواژهها | ||
| Czochralski؛ Induction heating؛ Electromagnetic wave؛ Electrical conductivity | ||
| مراجع | ||
|
[1] Depuydt, B., Theuwis, A. and Romandic, I., 2006. Germanium: From the first application of Czochralski crystal growth to large diameter dislocation-free wafers. Materials Science in Semiconductor Processing, 9(4-5), pp.437-443. [2] Patidar, B., M. Hussain, M., Jha, S.K., Sharma, A. and Tiwari, A.P., 2017. Analytical, numerical and experimental analysis of induction heating of graphite crucible for melting of non‐magnetic materials. IET Electric Power Applications, 11(3), pp.342-351. [3] Miller, W., Abrosimov, N., Fischer, J., Gybin, A., Juda, U., Kayser, S. and Janicskó-Csáthy, J., 2019. Quasi-transient calculation of Czochralski growth of Ge crystals using the software elmer. Crystals, 10(1), p.18. [4] Gresho, P.M. and Derby, J.J., 1987. A finite element model for induction heating of a metal crucible. Journal of crystal growth, 85(1-2), pp.40-48. [5] Derby, J.J., Atherton, L.J. and Gresho, P.M., 1989. An integrated process model for the growth of oxide crystals by the Czochralski method. Journal of crystal growth, 97(3-4), pp.792-826. [6] Chen, Q.S., Zhang, H., Prasad, V., Balkas, C.M. and Yushin, N.K., 2001. Modeling of heat transfer and kinetics of physical vapor transport growth of silicon carbide crystals. J. Heat Transfer, 123(6), pp.1098-1109. [7] Jing, C.J., Kobayashi, M., Tsukada, T., Hozawa, M., Fukuda, T., Imaishi, N., Shimamura, K. and Ichinose, N., 2003. Effect of RF coil position on spoke pattern on oxide melt surface in Czochralski crystal growth. Journal of crystal growth, 252(4), pp.550-559. [8] Du, D.X. and Munakata, T., 2005. Temperature distribution in an inductively heated CZ crucible. Journal of crystal growth, 283(3-4), pp.563-575. [9] Kirpo, M., 2013. Global simulation of the Czochralski silicon crystal growth in ANSYS FLUENT. Journal of crystal growth, 371, pp.60-69. [10] Tavakoli, M.H., Renani, E.K., Honarmandnia, M. and Ezheiyan, M., 2018. Computational analysis of heat transfer, thermal stress and dislocation density during resistively Czochralski growth of germanium single crystal. Journal of Crystal Growth, 483, pp.125-133. [11] Saadatirad, M., Tavakoli, M.H., Khodamoradi, H. and Masharian, S.R., 2021. Effect of the pulling, crystal and crucible rotation rate on the thermal stress and the melt–crystal interface in the Czochralski growth of germanium crystals. CrystEngComm, 23(39), pp.6967-6976. [12] Semiatin, S.L., 1988. Elements of induction heating: design, control, and applications. Asm International. [13] Rudnev, V., Loveless, D. and Cook, R.L., 2017. Handbook of induction heating. CRC press. [14] Leatherman, A.F. and Stutz, D.E., 1969. Induction Heating Advances: Applications to 5800° F (Vol. 5071). Technology Utilization Division, National Aeronautics and Space Administration. [15] Tavakoli, M.H. and Karbaschi, H., 2021. Numerical study of influences of the input current frequency on the induction heating process. Progress in Physics of Applied Materials, 1(1), pp.44-49. [16] Tavakoli, M.H., Karbaschi, H. and Samavat, F., 2009. Computational modeling of induction heating process. Progress in Electromagnetics research letters, 11, pp.93-102. | ||
|
آمار تعداد مشاهده مقاله: 345 تعداد دریافت فایل اصل مقاله: 333 |
||