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طراحی، مدلسازی و شبیه سازی میکروفون خازنی ممز بیسیم | ||
| مدل سازی در مهندسی | ||
| دوره 23، شماره 80، فروردین 1404، صفحه 197-208 اصل مقاله (1.01 M) | ||
| نوع مقاله: مقاله پژوهشی | ||
| شناسه دیجیتال (DOI): 10.22075/jme.2024.32355.2561 | ||
| نویسندگان | ||
| حمیدرضا حبیبی1؛ بهرام عزیزالله گنجی* 1؛ رمضانعلی جعفری تلوکلایی 2 | ||
| 1دانشکده مهندسی برق و کامپیوتر، دانشگاه صنعتی نوشیروانی بابل، بابل، ایران | ||
| 2دانشکده مهندسی مکانیک، دانشگاه صنعتی نوشیروانی بابل، بابل، ایران | ||
| تاریخ دریافت: 27 آبان 1402، تاریخ بازنگری: 28 مرداد 1403، تاریخ پذیرش: 31 مرداد 1403 | ||
| چکیده | ||
| در این مقاله یک ساختار جدید از میکروفون خازنی ممز(MEMS) بیسیم طراحی، آنالیز و مدلسازی شده‌است. در ساختار پیشنهادی از یک میکروفون با ولتاژ پولین بسیار کم استفاده شده که با یک سلف ممزی سری است. سلف ممزی با یک سلف خارجی در حالت القای متقابل قرار دارد و ولتاژ مورد نیاز میکروفون را تامین می‌کند. اطلاعات دریافتی میکروفون نیز از طریق القای متقابل منتقل می شود. سنسور برای استفاده در سمعک ناشنوایان طراحی شده است. ابعاد میکروفون برابر μm2250×250 است که در میان سلف ممزی با ابعاد mm22×2 قرار دارد. میکروفون و سلف ممزی هر کدام به صورت جداگانه تحلیل شده و سپس با استفاده از المان‌های فشرده الکترونیکی مدل سازی شده و روابط ریاضی برای طراحی سنسور ارائه شده است. شبیه‌سازی بخش ممزی در نرم‌افزار Intellisuite و شبیه‌سازی بخش مداری، در نرم‌افزارADS انجام شده‌است. سنسور به علت استفاده از المان های غیر فعال و ممزی، کم نویز و کم توان بوده و سیگنال به نویز و توان مصرفی آن به ازای ورودی ولتاژ mv100 برابرdb79.6 و mW204 است. به دلیل عدم وجود باتری، ابعاد سنسور پیشنهادی کوچک است و برای کاربرد‌‌های پزشکی و امنیتی مناسب است. | ||
| کلیدواژه‌ها | ||
| سنسور بیسیم؛ مدلسازی؛ میکروفون ممزی؛ سلف ممزی؛ تغذیه غیر فعال | ||
| عنوان مقاله [English] | ||
| Design, Modeling and Simulation of Wireless MEMS Capacitive Microphone | ||
| نویسندگان [English] | ||
| Hamidreza Habibi1؛ Bahram Azizollah Gangi1؛ Ramazan Ali Jafari Talookolaei2 | ||
| 1Faculty of Electrical and Computer Engineering, Babol Noshirvani University of Technology, Babol, Iran | ||
| 2Faculty of Mechanical Engineering, Babol Noshirvani University of Technology, Babol, Iran | ||
| چکیده [English] | ||
| In this article, a new structure of the wireless MEMS condenser microphone has been designed, analyzed and modeled. In the proposed structure, a microphone with low pull-in voltage is used, which is in series with a Mems inductor. The internal inductor is in mutual induction mode with an external inductor and provides the required voltage for the microphone. The information received by the microphone is also transmitted through mutual induction. The sensor is designed for use in hearing aids for the deaf. The dimensions of the microphone are 250×250μm2, which is located in the middle of the Mems inductor with dimensions of 2×2mm2. The microphone and the inductor have been analyzed separately and then modeled using compact electronic elements and the formula required for their design has been calculated. The simulation of Mems microphone and Mems inductor has been done in Intellisuite software and their circuit simulation has been done in ADS software. The sensor is very low-noise and low-power, and its signal-to-noise and power consumption per input voltage of 100 mv is equal to 79.6 db and 204 mW. Due to the absence of batteries, the dimensions of the proposed sensor are small and suitable for medical and security applications. | ||
| کلیدواژه‌ها [English] | ||
| Wireless sensor, Modeling, MEMS microphone, MEMS inductor, Passive feeding | ||
| مراجع | ||
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[1] H.F. Liu, Z.C. Luo, Z.K. Hu, S.Q. Yang, L.C. Tu, Z.B. Zhou, and M. Kraft. "A review of high-performance MEMS sensors for resource exploration and geophysical applications." Petroleum Science 19, no. 6 (2022): 2631-2648. [2] X. Ru, N. Gu, H. Shang, and H. Zhang. "MEMS inertial sensor calibration technology: Current status and future trends." Micromachines 13, no. 6 (2022): 879. [3] M. Farsi, and K. Monfaredi." Design and Simulation of Second Order Sigma-Delta Modulator with Very High Precision and Low Power Consumption for Medical Applications." Journal of Modeling in Engineering 16, no. 55 (2018): 191-197. (in Persian) [4] P. Neamatollahi. "Qualitative Evaluation of Clusters in Wireless Sensor Networks Using Fuzzy Logic." Journal of Modeling in Engineering 21, no. 73 (2023): 93-102. (in Persian) [5] S. Valizade Alavi, and N. Amjady. " Anti-Hazard wrist strap with the capability of sensing phase to phase electrocution by using of RF transceivers modules." Journal of Modeling in Engineering 15, no. 51 (2017): 147-157. (in Persian) [6] M. Hajiee, M. Fartash, N. Osati Eraghi. "A Trust and Energy-Aware Based Routing Approach in Wireless Sensor Networks Using ODMA Algorithm." Journal of Modeling in Engineering 19, no. 67 (2021): 207-221. (in Persian) [7] J. Park, J.K. Kim, S.J. Patil, J.K. Park, S. Park, and D.W. Lee. "A wireless pressure sensor integrated with a biodegradable polymer stent for biomedical applications." Sensors 16, no. 6 (2016): 809. [8] K.C. Katuri, S. Asrani, and M.K. Ramasubramanian. "Intraocular pressure monitoring sensors." IEEE Sensors Journal 8, no. 1 (2008): 12-19. [9] J.A. Potkay. "Long term, implantable blood pressure monitoring systems." Biomedical Microdevices 10 (2008): 379-392. [10] P. Cong. "Wireless batteryless in vivo blood pressure sensing microsystem for small laboratory animal real-time monitoring." PhD diss, Case Western Reserve University, 2008. [11] B. Nie, R. Huang, T. Yao, Y. Zhang, Y. Miao, C. Liu, J. Liu, and X. Chen. "Textile‐based wireless pressure sensor array for human‐interactive sensing." Advanced Functional Materials 29, no. 22 (2019): 1808786. [12] M.A. Fonseca, J.M. English, M. Von Arx, and M.G. Allen. "Wireless micromachined ceramic pressure sensor for high-temperature applications." Journal of Microelectromechanical Systems 11, no. 4 (2002): 337-343. [13] Q. Tan, H. Kang, J. Xiong, L. Qin, W. Zhang, C. Li, L. Ding, X. Zhang, and M. Yang. "A wireless passive pressure microsensor fabricated in HTCC MEMS technology for harsh environments." Sensors 13, no. 8 (2013): 9896-9908. [14] P. Cong, W.H. Ko, and D.J. Young. "Wireless batteryless implantable blood pressure monitoring microsystem for small laboratory animals." IEEE Sensors Journal 10, no. 2 (2009): 243-254. [15] A.S. Sezen, S. Sivaramakrishnan, S. Hur, R. Rajamani, W. Robbins, and B.J. Nelson. "Passive wireless MEMS microphones for biomedical applications." (2005): 1030-1034. [16] G. Ottoy, B. Thoen, and L. De Strycker. "A low-power MEMS microphone array for wireless acoustic sensors." In 2016 IEEE Sensors Applications Symposium (SAS), pp. 1-6. IEEE, 2016. [17] B. Azizollah Ganji, and S. Babaei Sedaghat. " Design of MEMS Frog shape Microphone with High Sensitivity and low voltage using PSO Algorithm." Journal of Modeling in Engineering 17, no. 59 (2019): 141-151. (in Persian) [18] S. Chowdhury, G.A. Jullien, M.A. Ahmadi, W.C. Miller, D.J. Keating, and N. Finch. "Acoustic and magnetic MEMS components for a hearing aid instrument." In Design, Test, Integration, and Packaging of MEMS/MOEMS, vol. 4019, pp. 122-133. SPIE, 2000. [19] K. Van Caekenberghe. "Modeling rf mems devices." IEEE Microwave Magazine 13, no. 1 (2012): 83-110. [20] P. Pirouznia, and B. Azizollah Ganji. "Analytical optimization of high performance and high quality factor MEMS spiral inductor." Progress In Electromagnetics Research M 34 (2014): 171-179. [21] S.S. Mohan. The design, modeling and optimization of on-chip inductor and transformer circuits. Stanford University, 2000. [22] K. Finkenzeller. RFID handbook: fundamentals and applications in contactless smart cards, radio frequency identification and near-field communication. John wiley & sons, 2010. [23] N. Xue, S.P. Chang, and J.B. Lee. "A SU-8-based microfabricated implantable inductively coupled passive RF wireless intraocular pressure sensor." Journal of Microelectromechanical Systems 21, no. 6 (2012): 1338-1346. [24] L. Yu, B.J. Kim, and E. Meng. "Chronically implanted pressure sensors: challenges and state of the field." Sensors 14, no. 11 (2014): 20620-20644. [25] G.S. Wood, A. Torin, A.K. Al-mashaal, L.S. Smith, E. Mastropaolo, M.J. Newton, and R. Cheung. "Design and characterization of a micro-fabricated graphene-based MEMS microphone." IEEE Sensors Journal 19, no. 17 (2019): 7234-7242. [26] H.M. Mustapha, M.M. Wee, A.R. Zain, and MOHD AMBRI Mohamed. "Characterization of graphene based capacitive microphone." Sains Malaysiana 48, no. 6 (2019): 1201-1207. [27] B.H. Kim, and H.S. Lee. "Acoustical-thermal noise in a capacitive MEMS microphone." IEEE Sensors Journal 15, no. 12 (2015): 6853-6860. [28] A. Dehé, M. Wurzer, M. Füldner, and U. Krumbein. "Design of a poly silicon MEMS microphone for high signal-to-noise ratio." In 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC), pp. 292-295. IEEE, 2013. [29] S. Babaei Sedaghat, B. Azizolla Ganji, and R. Ansari. "Design and modeling of a frog-shape MEMS capacitive microphone using SOI technology." Microsystem Technologies 24 (2018): 1061-1070. | ||
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